TiN/ZrN multilayers coatings have been deposited using a reactive RF magnetron sputtering process. Nitride layers with different sputtering conditions have been stacked in order to obtain superlattices having different preferred orientations. The deposition rate has been considered as independent parameter which changes the energy and the momentum transfer of the backscattered particles, influencing films structure evolution.
Trans Tech Publications Ltd
1 Jan 2006
Volume: 45 Pages: 1206-1211
Advances in Science and Technology