A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of ±50 μT with a sensitivity of 0.45 mV/μT.
8 Nov 2006
Volume: 132 Issue: 1 Pages: 90-97
Sensors and Actuators A: Physical