High demand of today’s market stimulates the development of high resolution, small and low power magnetic sensors. New applications, such as electronic compass, magnetic ink reading, vehicle detection, non-destructive testing of metals and detection of markers in medicine, are emerging everyday.The goal of this thesis is the development, fabrication, with standard CMOS technology, and characterization of an integrated micro-fluxgate. The objective is to design a magnetic sensor for portable compass application, operating at 5 V voltage supply provided by batteries, and with a power consumption of few milliwatt. The goal is accomplished using a magnetic core 1 µm thick, realized with the DC-magnetron sputtering technique.
1 Jan 2006
Universita Degli Studi Di Pavia