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Type: 
Journal
Description: 
Aluminum nitride (AlN) thin films were deposited by sputtering on Ti bottom electrodes and integrated on a kapton substrate for flexible and stretchable electronics. The aim of this work was to find the best combination of Ti underlayer sputtering conditions and AlN over-growth to obtain the (002) nitride orientation, fundamental requirement for the piezoelectric response of the material in piezoelectric devices. Flexible electronics represent today’s cutting-edge electronic technologies thanks to their low cost and easy fabrication scalability.
Publisher: 
Springer
Publication date: 
26 Oct 2017
Authors: 
Biblio References: 
Volume: 457 Pages: 41
Origin: 
Sensors and Microsystems: Proceedings of the 19th AISEM 2017 National Conference