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Zirconium oxynitride films were deposited by RF reactive magnetron sputtering in water vapor–nitrogen atmosphere varying the deposition temperature from RT to 600 °C. The influence of the substrate temperature on the films physical properties was investigated. The obtained films quality was evaluated using optical analysis, X-ray diffraction, X-photoelectron spectroscopy, and Secondary Ion mass spectroscopy. It was found that the variation of the substrate temperature from RT to 600 °C caused the transition from cubic phase of Zr2ON2 to ZrN one, as confirmed by TEM observations. In particular, a co-presence of Zr3N4–ZrN was detected when the deposition was performed at 400 °C. Moreover, Forouhi–Bloomer dispersion equations for extinction coefficient (k) and deconvolution of XPS spectra are utilized to further elucidate chemical structure.
Publication date: 
15 Mar 2010

A Rizzo, MA Signore, L Mirenghi, A Cappello, L Tapfer

Biblio References: 
Volume: 204 Issue: 12-13 Pages: 2019-2022
Surface and Coatings Technology