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The Matrix Assisted Pulsed Laser Evaporation (MAPLE) technique has been used, for the first time, for the successful deposition of titania (TiO2) nanostructured thin films. An aqueous solution (20% wt) of colloidal TiO2 nanoparticles with anatase phase, synthesized by a novel chemical route, was frozen and then irradiated with a pulsed ArF excimer laser (λ= 193 nm, τ= 20 ns). The nanoparticles were deposited on (100) Si substrates. A uniform and compact distribution of TiO2 nanoparticles forming a continuous film was obtained, as demonstrated by high resolution Scanning Electron Microscopy (SEM-FEG) inspection. Randomly distributed spherical particles with an average diameter of 200 nm were also observed on the film. A comparison with a spin coated thin film obtained from the same starting solution allowed to better evaluate the effects of the laser deposition process. Energy Dispersive X-ray …
Publication date: 
1 Jan 2006

AP Caricatoa, M Catalanob, G Ciccarellac, M Martinoa, R Rellab, F Romanoa, J Spadavecchiab, A Taurinob, T Tunnoa, D Valerinia

Biblio References: 
Volume: 2 Pages: 43-7
Digest J. of Nanomaterials and Biostructures