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Laser ion source for Ge ion implantation of silicon surfaces

Type: 
Book
Description: 
Publisher: 
SPIE-The International Society for Optical Engineering
Publication date: 
1 Jan 2006
Authors: 

Fabio Belloni, Vincenzo Nassisi, L Torrisi, J Wolowski, Domenico Doria, Antonella Lorusso, L Velardi

Biblio References: 
Volume: 6346 Pages: 634634-1-634634-8
Origin: 
Proc. SPIE-XVI International Symposium on Gas Flow and Chemical Lasers & High Power Lasers
Link: 
https://scholar.google.it/citations?view_op=view_citation&hl=en&citation_for_vie...

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