Type:
Journal
Description:
Semiconductor sensors based on nanocrystalline SnO2, In2O3 and In₂O3-SnO₂ thin films have been investigated for detecting low concentration (2-20 ppm) of nitrogen dioxide in dry air. In this work the gas-sensitive layers were prepared by modified sol-gel methods making use of no-standard precursors and a suitable surfactant. The samples have been morphologically characterized by SEM. Good gas-sensing responses towards NO₂ have been found for all the prepared samples with improved performances for the In₂O3-SnO2 based sensor. The performances of the sensors have been discussed according to the surface chemical reactions between the gas phase and the semiconductor.
Publisher:
World Scientific
Publication date:
24 Jul 2008
Biblio References:
Pages: 210
Origin:
Sensors And Microsystems-Proceedings Of The 10th Italian Conference