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Matrix assisted pulsed laser evaporation (MAPLE) is a new promising laser-based technique thought for polymer or biomaterial thin films deposition. In this work, the MAPLE technique has been used for the deposition of titania (TiO2) nanoparticle thin films to be used for gas sensor applications. For this purpose, an aqueous solution of TiO2 nanoparticles, synthesized by a novel chemical route, was frozen at the liquid nitrogen temperature and introduced in a vacuum chamber to be irradiated with a pulsed ArF excimer laser. The volatile solvent was pumped away while the TiO2 nanoparticles were deposited on Si and Al2O3 substrates. A uniform distribution of TiO2 nanoparticles with an average size of about 10 nm was obtained, as demonstrated by high resolution scanning electron microscopy (SEM-FEG) inspection. We realized gas-sensing devices based on resistive transduction mechanism by using the TiO2 …
Publication date: 
15 Nov 2007

R Rella, J Spadavecchia, MG Manera, S Capone, A Taurino, M Martino, AP Caricato, T Tunno

Biblio References: 
Volume: 127 Issue: 2 Pages: 426-431
Sensors and Actuators B: Chemical