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Type: 
Journal
Description: 
In this paper a double axis planar micro-Fluxgate magnetic sensor is presented. The ferromagnetic core material, the Vitrovac 6025 X, has been deposited on top of the coils with the DC-magnetron sputtering technique, a new type of procedure with respect the existing solutions in the field of Fluxgate sensor. This procedure allows us to obtain a core with the good magnetic properties of the amorphous ferromagnetic material, typical of a core 25 µm thick, but with a thickness of only 1 µm, typical of a core electrodeposited. The micro-Fluxgate has been realized in a 0.5 µm CMOS process using copper metal lines to realize the excitation coil and alumınıum metal lines for the sensing coils. Applying a triangular excitation current of 18 mA peak at 100 kHz the magnetic sensitivity achieved is about 0.45 mV/µT, suitable for detecting the Earth's magnetic field (±50 µT), while the linearity error is 1.15% of the full scale. The maximum angle error of the sensor, evaluating the Earth magnetic field, is 3.4. The power consumption of the sensor is about 13.7 mW.
Publisher: 
World Scientific
Publication date: 
1 Jan 2008
Authors: 

Enrico Melissano, Pietro Siciliano

Biblio References: 
Pages: 127
Origin: 
Proceedings of the 11th Italian Conference on Sensors and Microsystems, Lecce, Italy, 8-10 February 2006