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Type: 
Conference
Description: 
The knowledge of material properties like Young’s modulus and residual stress is crucial for a reliable design of devices with optimized performance. Several works discussed on the determination of the mechanical properties of thin/thick films and microstructures from deflection measurements by a profiler. This work provides an approximate solution for the load-deflection response of perforated membranes clamped on two opposite edges subjected to quasi-point pressure loads applied by a profilometer. SixNy/a-Si/SixNy thin film membranes of different sizes and porosities were fabricated by unconventional 100 °C PECVD process using surface micromachining approach. Tri-layer thin films were mechanically characterized by nanoindentation tests and residual stress measurements based on the wafer curvature method. Load-deflection measurements were done by applying quasi-point loads in the …
Publisher: 
Springer, Cham
Publication date: 
21 Feb 2018
Authors: 

Luca Francioso, Chiara De Pascali, Alvise Bagolini, Donatella Duraccio, Pietro Siciliano

Biblio References: 
Pages: 619-627
Origin: 
Convegno Nazionale Sensori