Dielectric Barrier Discharge (DBD) plasma devices have been designed and manufactured with micro scale dimensions through photolithographic process on fiber glass substrate. AC operation under sinusoidal voltage up to 14 kVpp and carrier frequency up to 2.5 kHz has been investigated experimentally by means of smoke flow visualizations and Particle Image Velocimetry. Velocity profiles, maximum induced velocity and induced body force have been calculated.A comparison between the microactuator and a conventional macroactuator has been performed. It has been demonstrated that the microactuator produces velocities on the order of the macro scale actuator with a significant reduction in inception voltage, size and mass. This leads to a simpler and a less intrusive dispositive.
1 Jun 2013
Proc. 4th Imeko TC19 Symp. Environ. Meas. Protecting Environ.