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In this work, an experiment was carried out in order to exploit the physical properties of an electrode structure with nanometric gap to enable the operation of MOX sensors at low temperature independently from the gas sensing properties of the adopted active material. The 100 nm-gap fingers gas sensor array was fabricated by using electron beam and UV optical lithography onto 4″ silicon wafers (guaranteeing high process yield). SnO2 nanoparticles (NPs) synthesized by sol–gel/solvothermal method were trapped between the nanogap electrodes by dielectrophoresis, and scanning electron microscopy and atomic force microscopy surface analysis were used to investigate the semiconducting NPs dispersion between the nanogap fingers. Nanogap SnO2 NPs based-sensor responses to acetone and ethanol in dry air carrier gas at near room temperatures were reported, discussed, and compared with those …
American Chemical Society
Publication date: 
12 Mar 2020

Luca Francioso, Chiara De Pascali, Pasquale Creti, Antonio V Radogna, Simonetta Capone, Antonietta Taurino, Mauro Epifani, Chiara Baldacchini, Anna R Bizzarri, Pietro A Siciliano

Biblio References: 
Volume: 3 Issue: 4 Pages: 3337-3346
ACS Applied Nano Materials