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Present work shows recent progresses in thin film-based flexible and wearable thermoelectric generator (TEG), finalized to support energy scavenging and local storage for low consumption electronics in Ambient Assisted Living (AAL) applications and buildings integration. The proposed TEG is able to recover energy from heat dispersed into the environment converting a thermal gradient to an effective electrical energy available to power ultra-low consumption devices. A low cost fabrication process based on planar thin-film technology was optimized to scale down the TEG dimensions to micrometer range. The prototype integrates 2778 thermocouples of sputtered Sb2Te3 and Bi2Te3 thin films (1 μm thick) on an area of 25 cm2. The electrical properties of thermoelectric materials were investigated by Van der Pauw measurements. Transfer Length Method (TLM) analysis was performed on three different multi-layer …
International Society for Optics and Photonics
Publication date: 
24 May 2013
Biblio References: 
Volume: 8763 Pages: 876306
Smart Sensors, Actuators, and MEMS VI