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Zr–N films were grown on glass substrates via radio-frequency magnetron sputtering using an Ar + N2 + H2 mixture. Hydrogen was employed in order to reduce oxygen contamination coming from background pressure, as confirmed by secondary ion mass spectroscopy analysis. The tuned process parameter was the nitrogen flux percentage (RN2) in the mixture. The crystallographic structure of the films was studied using x-ray diffraction. The measurements show that the films deposited at low RN2 (lower than or equal to 50%) crystallize in the rocksalt ZrN structure. As RN2 exceeds 50%, the film exhibits the co-presence of ZrN and Zr3N4 (denoted as o-Zr3N4) phases. When the deposition is performed in only nitrogen atmosphere (RN2 = 100%), a broad peak located at 2θ ≈ 32.2° is mainly attributed to the contribution coming from (320) planes of the o-Zr3N4. An envelope method, based on the optical …
American Vacuum Society
Publication date: 
7 Nov 2011

MA Signore, D Valerini, L Tapfer, G Caretto, A Rizzo

Biblio References: 
Volume: 29 Issue: 6 Pages: 061507
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films