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Semiconductor sensors based on nanocrystalline SnO 2, In 2 O 3 and In 2 O 3-SnO 2 thin films have been investigated for detecting low concentration (2-20 ppm) of nitrogen dioxide in dry air. In this work the gas-sensitive layers were prepared by modified sol-gel methods making use of no-standard precursors and a suitable surfactant. The samples have been morphologically characterized by SEM. Good gas-sensing responses towards NO 2 have been found for all the prepared samples with improved performances for the In 2 O …
Publication date: 
1 Jan 2008
Biblio References: 
Pages: 210-215
Sensors And Microsystems