Paolo Pellegrino, Isabella Farella, Mariafrancesca Cascione, Valeria De Matteis, Alessandro Paolo Bramanti, Lorenzo Vincenti, Antonio Della Torre, Fabio Quaranta, Rosaria Rinaldi

Pile-Ups Formation in AFM-Based Nanolithography: Morpho-Mechanical Characterization and Removal Strategies

Micromachines [Multidisciplinary Digital Publishing Institute], Volume: 13 Issue: 11 Pages: 1982

MA Signore, L Velardi, C De Pascali, I Kuznetsova, L Blasi, F Biscaglia, F Quaranta, P Siciliano, L Francioso

Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical & chemical properties and suitability for piezoelectric device integration

Applied Surface Science [North-Holland], Volume: 599 Pages: 154017

G Fersurella, A Della Torre, F Quaranta, P Losito, L D'Alessandro, S Invitto, R Rinaldi

A wearable and smart actuator for haptic stimulation

Micro and Nano Engineering [Elsevier], Volume: 16 Pages: 100161

Paolo Pellegrino, Alessandro Paolo Bramanti, Isabella Farella, Mariafrancesca Cascione, Valeria De Matteis, Antonio Della Torre, Fabio Quaranta, Rosaria Rinaldi

Pulse-Atomic Force Lithography: A Powerful Nanofabrication Technique to Fabricate Constant and Varying-Depth Nanostructures

Nanomaterials [MDPI], Volume: 12 Issue: 6 Pages: 991

Paolo Pellegrino, Isabella Farella, Mariafrancesca Cascione, Valeria De Matteis, Alessandro Paolo Bramanti, Antonio Della Torre, Fabio Quaranta, Rosaria Rinaldi

Investigation of the Effects of Pulse-Atomic Force Nanolithography Parameters on 2.5 D Nanostructures’ Morphology

Nanomaterials [Multidisciplinary Digital Publishing Institute], Volume: 12 Issue: 24 Pages: 4421

Anna Persano, Fabio Quaranta, Antonietta Taurino, Pietro Aleardo Siciliano, Jacopo Iannacci

Thin Film Encapsulation for RF MEMS in 5G and Modern Telecommunication Systems

Sensors [Multidisciplinary Digital Publishing Institute], Volume: 20 Issue: 7 Pages: 2133

MA Signore, G Rescio, C De Pascali, V Iacovacci, P Dario, A Leone, F Quaranta, A Taurino, P Siciliano, L Francioso

Fabrication and characterization of AlN-based flexible piezoelectric pressure sensor integrated into an implantable artificial pancreas

Scientific reports [Nature Publishing Group], Volume: 9 Issue: 1 Pages: 1-11

Anna Persano, Jacopo Iannacci, Pietro Siciliano, Fabio Quaranta

Out-of-plane deformation and pull-in voltage of cantilevers with residual stress gradient: experiment and modelling

Microsystem Technologies [Springer Berlin Heidelberg], Volume: 25 Issue: 9 Pages: 3581-3588

Anna Persano, Jacopo Iannacci, Pietro Siciliano, Fabio Quaranta

Out-of-plane deformation and pull-in voltage of cantilevers with residual stress gradient: Experiment and modelling

Microsystem Technologies [Springer Berlin Heidelberg], Volume: 25 Issue: 9 Pages: 3581-3588

Yulia Plekhanova, Sergei Tarasov, Vladimir Kolesov, Iren Kuznetsova, Maria Signore, Fabio Quaranta, Anatoly Reshetilov

Effects of Polymer Matrices and Carbon Nanotubes on the Generation of Electric Energy in a Microbial Fuel Cell

Membranes [Multidisciplinary Digital Publishing Institute], Volume: 8 Issue: 4 Pages: 99

A Persano, P Siciliano, F Quaranta, A Taurino, A Lucibello, Romolo Marcelli, G Capoccia, E Proietti, Alvise Bagolini, Jacopo Iannacci

Wafer-level micropackaging in thin film technology for RF MEMS applications

Microsystem Technologies [Springer Berlin Heidelberg], Volume: 24 Pages: 575-585

A Persano, P Siciliano, F Quaranta, A Taurino, A Lucibello, Romolo Marcelli, G Capoccia, E Proietti, A Bagolini, J Iannacci

Wafer-level micropackaging in thin film technology for RF MEMS applications

Microsystem Technologies [Springer Berlin Heidelberg], Volume: 24 Issue: 1 Pages: 575-585

A Taurino, MA Signore, M Catalano, M Masieri, F Quaranta

and P. Siciliano

Sensors and Microsystems: Proceedings of the 19th AISEM 2017 National Conference [Springer], Volume: 457 Pages: 41

MA Signore, A Taurino, M Catalano, M Kim, Z Che, F Quaranta, P Siciliano

Growth assessment of (002)-oriented AlN thin films on Ti bottom electrode deposited on silicon and kapton substrates

Materials & Design [Elsevier], Volume: 119 Pages: 151-158

Anna Persano, Fabio Quaranta, Giovanni Capoccia, Emanuela Proietti, Andrea Lucibello, Romolo Marcelli, Alvise Bagolini, Jacopo Iannacci, Antonietta Taurino, Pietro Siciliano

Influence of design and fabrication on RF performance of capacitive RF MEMS switches

Microsystem Technologies [Springer Berlin Heidelberg], Volume: 22 Pages: 1741-1746

MA Signore, A Taurino, D Valerini, A Rizzo, I Farella, M Catalano, F Quaranta, P Siciliano

Role of oxygen contaminant on the physical properties of sputtered AlN thin films

Journal of Alloys and Compounds [Elsevier], Volume: 649 Pages: 1267-1272

Anna Persano, Fabio Quaranta, Maria Concetta Martucci, Pietro Siciliano, Adriano Cola

On the electrostatic actuation of capacitive RF MEMS switches on GaAs substrate

Sensors and Actuators A: Physical [Elsevier], Volume: 232 Pages: 202-207

Marcella Matrecano, Pasquale Memmolo, Lisa Miccio, Anna Persano, Fabio Quaranta, Pietro Siciliano, Pietro Ferraro

Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization

Applied Optics [Optica Publishing Group], Volume: 54 Issue: 11 Pages: 3428-3432

Pouya Dianat, Anna Persano, Fabio Quaranta, Adriano Cola, Bahram Nabet

Anomalous capacitance enhancement triggered by light

IEEE Journal of Selected Topics in Quantum Electronics [IEEE], Volume: 21 Issue: 4 Pages: 1-5

Pouya Dianat, Anna Persano, Fabio Quaranta, Adriano Cola, Bahram Nabet

Anomalous capacitance enhancement triggered by light

IEEE Journal of Selected Topics in Quantum Electronics [IEEE], Volume: 21 Issue: 4 Pages: 1-5

Bahram Nabet, Marc Currie, Pouya Dianat, Fabio Quaranta, Adriano Cola

High-speed, high-sensitivity optoelectronic device with bilayer electron and hole charge plasma

ACS Photonics [American Chemical Society], Volume: 1 Issue: 7 Pages: 560-569

Antonietta Taurino, Maria Assunta Signore, Massimo Catalano, Isabella Farella, Fabio Quaranta, Massimo Di Giulio, Lorenzo Vasanelli, Pietro Siciliano

Structural, Morphological, and Chemical Properties of Cu/TiN Versus Cu Thin Layers for HEMT Backside Metallization

IEEE Transactions on Device and Materials Reliability [IEEE], Volume: 14 Issue: 3 Pages: 890-897

MA Signore, A Taurino, M Catalano, E Bellini, G Di Girolamo, AM Laera, F Quaranta, L Vasanelli, P Siciliano

Morphological and structural characterization of Sm–O–S compounds prepared by thermolysis of dithiocarbamate precursors

Thin solid films [Elsevier], Volume: 556 Pages: 241-246

Pouya Dianat, Richard Prusak, Anna Persano, Adriano Cola, Fabio Quaranta, Bahram Nabet

An unconventional hybrid variable capacitor with a 2-D electron gas

IEEE Transactions on Electron Devices [IEEE], Volume: 61 Issue: 2 Pages: 445-451

Pouya Dianat, Richard Prusak, Anna Persano, Adriano Cola, Fabio Quaranta, Bahram Nabet

An unconventional hybrid variable capacitor with a 2-D electron gas

IEEE Transactions on Electron Devices [IEEE], Volume: 61 Issue: 2 Pages: 445-451

MA Signore, E Bellini, A Taurino, M Catalano, MC Martucci, P Cretì, L Vasanelli, P Siciliano, F Quaranta

Structural and morphological evolution of aluminum nitride thin films: Influence of additional energy to the sputtering process

Journal of Physics and Chemistry of Solids [Pergamon], Volume: 74 Issue: 10 Pages: 1444-1451

Antonietta Taurino, Isabella Farella, Adriano Cola, Mauro Lomascolo, Fabio Quaranta, Massimo Catalano

Optimization of electron beam induced deposition process for the fabrication of diode-like Pt/SiO2/W devices

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena [American Vacuum Society], Volume: 31 Issue: 4 Pages: 041805

Rasha Ata Alla, Gurumurthy Hegde, Lachezar Komitov

Light-control of liquid crystal alignment from vertical to planar

Applied Physics Letters [American Institute of Physics], Volume: 102 Issue: 23 Pages: 233505

Eric M Gallo, Adriano Cola, Fabio Quaranta, Jonathan E Spanier

High speed photodetectors based on a two-dimensional electron/hole gas heterostructure

Applied Physics Letters [American Institute of Physics], Volume: 102 Issue: 16 Pages: 161108

Marc Currie, Pouya Dianat, Anna Persano, Maria Concetta Martucci, Fabio Quaranta, Adriano Cola, Bahram Nabet

Performance enhancement of a GaAs detector with a vertical field and an embedded thin low-temperature grown layer

Sensors [Multidisciplinary Digital Publishing Institute], Volume: 13 Issue: 2 Pages: 2475-2483

Anna Persano, Augusto Tazzoli, P Farinelli, Gaudenzio Meneghesso, Pietro Siciliano, Fabio Quaranta

K-band capacitive MEMS switches on GaAs substrate: Design, fabrication, and reliability

Microelectronics Reliability [Pergamon], Volume: 52 Issue: 9-10 Pages: 2245-2249

P Dianat, RW Prusak, E Gallo, A Cola, A Persano, F Quaranta, B Nabet

A highly tunable heterostructure metal-semiconductor-metal capacitor utilizing embedded 2-dimensional charge

Applied Physics Letters [American Institute of Physics], Volume: 100 Issue: 15 Pages: 153505

A Cretì, D Valerini, A Taurino, F Quaranta, M Lomascolo, R Rella

Photoluminescence quenching processes by NO2 adsorption in ZnO nanostructured films

Journal of Applied Physics [American Institute of Physics], Volume: 111 Issue: 7 Pages: 073520

A Cretı, D Valerini, A Taurino, F Quaranta, M Lomascolo, R Rella

Photoluminescence quenching processes by NO2 adsorption in ZnO nanostructured films

JOURNAL OF APPLIED PHYSICS [], Volume: 111 Pages: 073520

Anna Persano, Augusto Tazzoli, Adriano Cola, Pietro Siciliano, Gaudenzio Meneghesso, Fabio Quaranta

Reliability enhancement by suitable actuation waveforms for capacitive RF MEMS switches in III–V technology

Journal of Microelectromechanical Systems [IEEE], Volume: 21 Issue: 2 Pages: 414-419

Anna Persano, Augusto Tazzoli, Adriano Cola, Pietro Siciliano, Gaudenzio Meneghesso, Fabio Quaranta

Reliability enhancement by suitable actuation waveforms for capacitive RF MEMS switches in III–V technology

Journal of microelectromechanical systems [IEEE], Volume: 21 Issue: 2 Pages: 414-419

Marc Currie, Fabio Quaranta, Adriano Cola, Eric M Gallo, Bahram Nabet

Low-temperature grown GaAs heterojunction metal-semiconductor-metal photodetectors improve speed and efficiency

Applied Physics Letters [American Institute of Physics], Volume: 99 Issue: 20 Pages: 203502

Anna Persano, Adriano Cola, Giorgio De Angelis, Antonietta Taurino, Pietro Siciliano, Fabio Quaranta

Capacitive RF MEMS switches with tantalum-based materials

Journal of microelectromechanical systems [IEEE], Volume: 20 Issue: 2 Pages: 365-370

S Azimi, A Sandoughsaz, S Mohajerzadeh

Realization of Three-Dimensional Si and $\ hbox {SiO} _ {2} $ Nanowall Structures Using Reactive Ion Etching

Journal of microelectromechanical systems [IEEE], Volume: 20 Issue: 2 Pages: 353-354

Anna Persano, Fabio Quaranta, Adriano Cola, Antonietta Taurino, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano

Ta2O5 thin films for capacitive RF MEMS switches

Journal of Sensors [Hindawi], Volume: 2010

A Taurino, M Catalano, A Cretì, M Lomascolo, C Martucci, F Quaranta

Substrate-Au catalyst influence on the growth of ZnO nanorods

Materials Science and Engineering: B [Elsevier], Volume: 172 Issue: 3 Pages: 225-230

A Persano, F Quaranta, MC Martucci, P Cretì, P Siciliano, A Cola

Transport and charging mechanisms in Ta 2 O 5 thin films for capacitive RF MEMS switches application

Journal of Applied Physics [American Institute of Physics], Volume: 107 Issue: 11 Pages: 114502

Xia Zhao, Marc Currie, Adriano Cola, Fabio Quaranta, Eric Gallo, Jonathan E Spanier, Bahram Nabet

Time response of two-dimensional gas-based vertical field metal–semiconductor–metal photodetectors

IEEE transactions on electron devices [IEEE], Volume: 55 Issue: 7 Pages: 1762-1770

MG Manera, J Spadavecchia, A Leone, F Quaranta, R Rella, D Dell’Atti, M Minunni, Marco Mascini, P Siciliano

Surface plasmon resonance imaging technique for nucleic acid detection

Sensors and Actuators B: Chemical [Elsevier], Volume: 130 Issue: 1 Pages: 82-87

N Lovergine, M Traversa, P Paiano, I Farella, P Prete, A Cola, F Quaranta, AM Mancini

Development of a homoepitaxial technology for fabrication of X-and γ-ray detectors based on CdTe pin diodes

Nuclear Physics B-Proceedings Supplements [North-Holland], Volume: 166 Pages: 262-265

M Rizzi, M DAloia, B Castagnolo, YK Akimov, SN Ahmed, SP Beaumont, R Bertin, CN Booth, C Buttar, L Carraresi, G Bertolini, A Coche, G Bertuccio, A Cola, F Quaranta, L Vasanelli, C Canali, A Cavallini, F Nava, ME Fantacci, A Cola, F Quaranta, MA Ciocci, ME Fantacci, G Dearnaley, E Dubari, HE Nilsson, C Frojdh, B Norlin, U Fano, PE Gibbons, P Iredale, J Millman, A Grabel, J Jakubek, A Cejnarovaa, T Holya, S Pospisila, J Uhera, Z Vykydal, J Janesick, T Elliott, F Pool, T Jevremovic, S Kim, H Lee, C Han, K Lee, S Choi, GF Knoll, M Hoheisel, A Korn, J Giersch, A Lauber, C Leroy, PG Rancoita, C Leroy, G Lutz, EM Pell, JP Ponpon, M Rizzi, V Antonicelli, B Castagnolo, M Rizzi, B Castagnolo, M Rizzi, M Maurantonio, B Castagnolo, M Rizzi, M Maurantonio, B Castagnolo, M Rizzi, M Maurantonio, B Castagnolo, M Rizzi, M Maurantonio, B Castagnolo, N Tsoulfanidis, MJ Yaffe, JA Rowlands

X-ray detectors for digital radiography.

Journal of Applied Sciences [orgz], Volume: 10 Issue: 23 Pages: 1-28

Xia Zhao, Adriano Cola, Andrea Tersigni, Fabio Quaranta, Eric Gallo, Jonathan E Spanier, Bahram Nabet

Optically modulated high-sensitivity heterostructure varactor

IEEE electron device letters [IEEE], Volume: 27 Issue: 9 Pages: 710-712

J Spadavecchia, MG Manera, F Quaranta, P Siciliano, R Rella

Surface plamon resonance imaging of DNA based biosensors for potential applications in food analysis

Biosensors and Bioelectronics [Elsevier], Volume: 21 Issue: 6 Pages: 894-900

Xiying Chen, Bahram Nabet, Xia Zhao, Hung-Jen Huang, Adriano Cola, Fabio Quaranta, Antonietta Taurino, Marc Currie

Optical and electrical characterization of GaAs-based high-speed and high-sensitivity delta-doped resonant cavity-enhanced HMSM photodetector

IEEE transactions on electron devices [IEEE], Volume: 52 Issue: 4 Pages: 454-464

X Chen, B Nabet, X Zhao, HJ Huang, A Cola, F Quaranta, A Taurino, M Currie

Optoelectronics, Displays, and Imaging-Optical and Electrical Characterization of GaAs-Based High-Speed and High-Sensitivity Delta-Doped Resonant Cavity-Enhanced HMSM Photodetector

IEEE Transactions on Electron Devices [New York: Institute of Electrical and Electronics Engineers, Professional Technical Group on Electron Devices, 1963-], Volume: 52 Issue: 4 Pages: 454-464

A Cola, B Nabet, X Chen, F Quaranta

High speed heterostructure metal-semiconductor-metal photodetectors

Acta Physica Polonica A [Institute of Physics, Polish Academy of Science], Volume: 107 Issue: 1 Pages: 14-25